Custom Rotary Union Project: CB-0800104
Industry: SemiconductorMedia Type(s): GasEnvironment: Cleanroom, IndoorMaterial: Stainless SteelMax. Pressure(s): 14 PSI [1 BAR]Max. Speed: 200 RPM
Number of Passages: 4Passage Size(s): .125" [3.2 mm]Through Bore: NoneDiameter: 1.88" [47.8 mm]Length: 5.01" [127.3 mm]
4-passage rotary union designed to supply vacuum and nitrogen gas to a CMP wafer polishing machine. Features include a specialized shaft coating resulting in a hard, slippery, and corrosion-resistant surface for reduced maintenance and rebuild costs.